Low Temperature Processing Systems and Equipment

Achieve accurate and consistent low temperature epitaxial source performance for a variety of applications through Veeco low temperature epitaxial sources.

Corrosive Series Valved Cracker

With the superior flux control of the Corrosive Series Valved Cracker, complex structures not possible with conventional thermally controlled…

Phosphorus Valved Cracker

Best Return on Investment Phosphorus Solution

Selenium Valved Cracker

With multiple heating zones, the Selenium Valved Cracker can either generate cracked or uncracked selenium flux while resisting the…

Arsenic Valved Cracker

Industry Standard Arsenic Source

Ammonia Resistant Sources

Achieve increased uptime and lower repair costs with Veeco’s ammonia-resisant, extended life sources.

Single Filament Source

A cost-effective solution, the Single Filament Source is ideal for high vapor pressure materials.

Dual Filament Source

Using two independent filaments to heat the crucible, primary and tip, the Dual Filament Source provides enhanced heating control.

Sulfur Valved Cracker

Providing efficient material conservation and near instantaneous modulations for flux, the Sulfur Valved Cracker resists the chemical attack from…

SUMO Source

Offering critical temperature stability, the SUMO source is the best available source for non-valved evaporation of high vapor pressure…

Oxygen Resistant Sources

Achieve increased uptime and lower repair costs with Veeco’s oxygen-resistant, extended life sources.

Retractable Sources

Veeco retractable sources address fundamental limitations of MBE, including source capacity, source removal for maintenance and system uptime.