Ion Beam Systems & Sources

Veeco's unmatched Ion Beam know-how delivers proven etch and deposition performance enabling the data storage and MEMS markets for decades.

Ion Beam Systems

Veeco's unmatched Ion Beam know-how delivers proven etch and deposition performance enabling the data storage and MEMS markets for decades.

Sputtering Systems

When materials matter most, your ultra-precise, high-purity, thin film layer devices will achieve maximum uniformity and repeatability with our on beam deposition systems.

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Deposition Systems

Create ultra-precise, high-purity, thin film layer devices with maximum uniformity and repeatability with Ion Beam Deposition (IBD) Systems.

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Etch Systems

Etch precise, complex features for high-yield production of discrete microelectronic devices and components with the NEXUS® Ion Beam Etch (IBE) Systems.

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Ion Sources

Veeco offers the most comprehensive array of ion beam sources for a broad range of applications, including the industry's only Linear gridded sources.

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Diamond-Like Carbon

Your microelectronics, medical devices and automotive components need the thermal resistance and resistivity that can only be achieved with diamond-like carbon films created with our deposition systems.

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