Gas & Vapor Delivery Systems
Advanced semiconductor devices developed for the most advanced computing processes, such as AI and edge computing, need the ultra-high-purity environments of our gas and vapor deposition delivery systems.
Reduce production costs by purchasing lower-cost, higher-concentration gases with the Apex Gas Mixing System.
Get an improved gas mixture concentration with the Precision Gas Mixing System. It generates gas mixtures for tighter process…
As the industry standard for reproducible vapor delivery control of chemical precursor vapors and dopant gases in CVD and…