MBE Systems

MBE Systems

GENxplor R&D MBE System

GENxplor R&D MBE System

Industry's First Fully Integrated MBE System for the Compound Semiconductor R&D Market

Veeco's award-winning GENxplor™ R&D MBE System uses Veeco’s proven GEN10™ MBE system growth chamber design and features unmatched process flexibility, perfect for materials research on emerging technologies such as UV LEDs, high-efficiency solar cells and high-temperature superconductors. Its efficient single frame design combines all vacuum hardware with on-board electronics to make it up to 40 percent smaller than other MBE systems, saving valuable lab space. Because the manual system is integrated on a single frame, installation time is reduced. The open architecture design of the GENxplor MBE system also improves ease-of-use, provides convenient access to effusion cells and easier serviceability when compared to other MBE systems. When coupled with Veeco’s recently introduced retractable sources, the GENxplor MBE system represents the state-of-the-art in oxide materials research.

  • High quality epitaxial layers on substrates up to 3" in diameter
  • Unique, single frame architecture improves ease-of-use, provides convenient source access and enhanced serviceablility
  • Efficient, all-in-one design combines manual system with on-board electronics for 40 percent lab space savings compared to other MBE systems
  • Ideal for cutting-edge research on a wide variety of materials including GaAs, nitrides and oxides
  • Molly® software integrates easy recipe writing, automated growth control and always-on data recording
  • Optional Nova™ ultra high temperature substrate heater for proven performance at 1850°
  • Direct scalability to GEN20™, GEN200® and GEN2000® MBE systems

  Veeco MBE System shown in 2016 U.S. Army TV Commercial

 

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