Specialty Sources

Customizable Tools for Uncommon Challenges

When conventional sources hit their limits, specialty sources step in. These custom-designed plasma and vapor sources are engineered for III-V MBE and compound semiconductor applications where unique material delivery and control are critical.

What Makes Them Different

Specialty sources go beyond standard configurations. With tailored plasma generation, advanced ion control and the ability to handle everything from volatile precursors to refractory compounds, they open the door to innovative process development and precision film growth.

Where Specialty Sources Show Up

• Supporting integration of niche materials in next-gen device structures
• Delivering custom energy profiles to fine-tune film properties
• Enabling development of new materials and architectures beyond traditional tool limits

Veeco: Pushing the Limit of What's Possible

Veeco offers the most comprehensive selection of MBE sources, including single and dual filament designs. Our specialty source lineup includes customizable plasma systems and integration-ready modules. With real-time diagnostics and tight process control, these tools empower engineers to overcome complex deposition challenges and advance what’s possible in compound semiconductor fabrication.