MOCVD Systems

Veeco offers a range of industry-leading GaN and As/P MOCVD systems designed to maximize throughput while lowering cost of ownership for a variety of applications including display, 3D sensing, LiDAR, micro LED display, and optical data communications.

MOCVD Systems

Veeco offers a range of industry-leading GaN and As/P MOCVD systems designed to maximize throughput while lowering cost of ownership for a variety of applications including display, 3D sensing, LiDAR, micro LED display, and optical data communications.

TurboDisc Reactor: The Heart of Superior MOCVD Technology

Lumina As/P MOCVD Systems for Photonics Applications

The Lumina MOCVD platform incorporates the proprietary TurboDisc® reactor technology for outstanding film uniformity, yield and device performance for…
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Propel HVM GaN MOCVD System for Power, 5G RF and Photonics

Single-Wafer Reactor Technology Enables Efficient and High-Quality, GaN-Based Devices for Power, 5G RF and Photonics Applications Veeco’s Propel™ HVM…
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Propel 300mm GaN MOCVD System for 5G, Photonics and CMOS

Fully Automated, Single Wafer Cluster System Enables Production 5G RF, Photonics and advanced CMOS Devices on 300mm Substrates. The…
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TurboDisc EPIK 868 MOCVD System for LED Production

Veeco’s EPIK 868 MOCVD system is the LED industry highest productivity MOCVD system that reduces cost per wafer approximately…
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Propel GaN MOCVD System for R&D and Production

The Propel™ is a highly flexible, GaN-based system for R&D and small volume production designed to accelerate process development…
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Technologies & Products

Laser Processing Systems
Lithography Systems
Ion Beam Systems
Deposition Systems
Sputtering Systems
Etch Systems
Ion Sources
Gridded DC Ion Sources
Gridless End-Hall Ion Sources
Gridded RF Ion Sources
Diamond-Like Carbon
MOCVD Systems
Wet Processing Systems
MBE Technologies
MBE Systems
MBE Sources
Dopant
High Temperature
Low Temperature
Medium Temperature
Specialty Sources
MBE Components
Atomic Layer Deposition Systems
ALD Overview
ALD Advantages
ALD for Research
ALD for Production
ALD in Action
ALD Materials
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ALD for 3D Nanofabrication
III-V Semiconductor Devices
Batteries
Chalcogenides
Electronics
Encapsulation
Self-Assembled Monolayers (SAMS)
Water Splitting
ALD Knowledge Center
ALD Periodic Table
ALD Research
ALD Services
Physical Vapor Deposition Systems
Dicing and Lapping Systems
Gas & Vapor Delivery Systems