Propel GaN MOCVD System for R&D and Production

Built on Veeco’s Proven TurboDisc Technology to Accelerate Process Development for Next Generation Devices


Veeco’s Propel™ MOCVD system is designed as a flexible platform for early stage research and development and small production needs for nitride applications. The reactor is capable of processing 9×2”, 3×4”, 1×6” and 1×8” on various substrates such as silicon, sapphire and silicon carbide without any hardware modification between runs.The system deposits high-quality GaN films for multiple applications such as power, RF, & photonics. The R200 reactor is based on Veeco’s leading TurboDisc® design including the IsoFlange™ and SymmHeat™ technologies that provide laminar flow and uniform temperature profile across the entire wafer. Customers can easily transfer processes from Veeco D180, K465i™ or MaxBright™ systems to the Propel GaN MOCVD platform.

Access basic process information on how to grow a GaN HEMT structure on a Veeco® Propel® TurboDisc® MOCVD tool on a 200mm (8”) Silicon substrate. This information is not designed, intended, recommended, nor authorized for use in any type of commercial system or application.

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