Laser Processing Systems

Laser Processing Systems

Ultratech’s commercial laser processing system provides solutions to the difficult challenge of fabricating ultra-shallow junction and highly activated source/drain contacts.

LSA 101 Laser Spike Anneal System

Chosen by leading IDMs and foundries around the globe Veeco's LSA101 Ultratech System is preferred technology for high-volume manufacturing of advanced logic devices from 40nm to 14nm nodes

LSA 201 Ambient Control Laser Spike Anneal System

The LSA 201 has the same architecture as the LSA 101, but includes a patented micro chamber design, which enables full-wafer ambient control in a scanning laser system