The Industry Standard for Reproducible Vapor Delivery Control
The PiezoconĀ® Gas Concentration Sensor has become the industry standard among semiconductor manufacturers for accurate monitoring and reproducible delivery control of chemical precursor vapors and dopant gases in CVD and MOCVD process tools.
Production-proven with over 5,000 installations worldwide, the Piezocon system provides:
Related Resources:
Data Sheet: Piezocon Gas Concentration Sensor
White Paper: Improvement of Dopant Concentration Control with Acoustic Control System for B-SiGe Epitaxy Deposition
White Paper: Controlling the Silicon Deposition Rate in an EPITAXIAL Process