Piezocon Gas Concentration Sensor

The Industry Standard for Reproducible Vapor Delivery Control

The PiezoconĀ® Gas Concentration Sensor has become the industry standard among semiconductor manufacturers for accurate monitoring and reproducible delivery control of chemical precursor vapors and dopant gases in CVD and MOCVD process tools.

Production-proven with over 5,000 installations worldwide, the Piezocon system provides:

  • Improved process reproducibility and increased yield by tightly controlling the delivery of process gases and of precursor chemical vapors
  • Lower cost-of-operation by allowing more effective use of precursor chemicals, extending the use of precursor chemical sources and reducing the duration of flow to vent
  • Easier tool-to-tool matching with quantitative information directly meaningful to equipment and process engineers
  • Assistance in troubleshooting malfunction of gas and vapor delivery systems by using built-in diagnostic utilities


Related Resources:

Data Sheet: Piezocon Gas Concentration Sensor

White Paper: Improvement of Dopant Concentration Control with Acoustic Control System for B-SiGe Epitaxy Deposition

White Paper: Controlling the Silicon Deposition Rate in an EPITAXIAL Process



Special Conditions of Safe Use

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