Author(s): Strandwitz, Nicholas, Comstock, David, Grimm, Ronald L, Nichols-Nielander, Adam C, Elam, Jeffrey W and Lewis, Nathan S
Published: 2013
Author(s): Klug, Jeffrey A, Becker, Nicholas G, Riha, Shannon C, Martinson, Alex B F, Elam, Jeffrey W, Pellin, Michael J and Proslier, Thomas
Published: 2013
Web link: http://xlink.rsc.org/?DOI=c3ta12514a
Atomic layer deposition of TiO2 from tetrakis(dimethylamino)titanium and H2O
Author(s): Abendroth, Barbara, Moebus, Theresa, Rentrop, Solveig, Strohmeyer, Ralph, Vinnichenko, Mykola, Weling, Tobias, St�cker, Hartmut and Meyer, Dirk C
Published: 2013
Web link: http://linkinghub.elsevier.com/retrieve/pii/S0040609013012777
Author(s): Kim, Hyea: Lee, Jung Tae: Lee, Dong-Chan: Magasinski, Alexandre: Cho, Won il: Yushin, Gleb
Published: 2013
Web link: http://onlinelibrary.wiley.com/doi/10.1002/aenm.201300253/full
Regimes of leakage current in ALD-processed Al 2O 3thin-film layers
Author(s): Spahr, Holger, Reinker, Johannes, B�low, Tim, Nanova, Diana, Johannes, Hans-Hermann and Kowalsky, Wolfgang
Published: 2013
Web link: http://stacks.iop.org/0022-3727/46/i=15/a=155302?key=crossref.05f52296518d909da3d56dd31f928421
Author(s): Kim, Hyea: Lee, Jung Tae: Lee, Dong-Chan: Magasinski, Alexandre: Cho, Won il: Yushin, Gleb
Published: 2013
Author(s): Smietana, M, My?liwiec, M, Mikulic, P and Witkowski, B S
Published: 2013
Probing the properties of atomic layer deposited ZrO2 films on p-Germanium substrates
Author(s): Kerasidou, Ariadne P, Botzakaki, Martha A, Xanthopoulos, Nikolaos, Kennou, Stella, Ladas, Spyridon, Georga, Stavroula N and Krontiras, Christoforos A
Published: 2013
Web link: http://link.aip.org/link/JVTAD6/v31/i1/p01A126/s1&Agg=doi
Diffusion of implanted nitrogen in germanium
Author(s): Skarlatos, Dimitrios, Barozzi, Mario, Bersani, Massimo, Vouroutzis, Nikos Z and Ioannou Sougleridis, Vassilios
Published: 2013
Author(s): Kayaci, Fatma: Ozgit-Akgun, Cagla: Biyikli, Necmi: Uyar, Tamer
Published: 2013
Web link: http://xlink.rsc.org/?DOI=c3ra40359a