Bibliography

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Mundle, Rajeh M, Terry, Hampton S, Santiago, Kevin, Shaw, Dante, Bahoura, Messaoud, Pradhan, Aswini K, Dasari, Kiran and Palai, Ratnakar

Published: 2013

Web link: http://link.aip.org/link/JVTAD6/v31/i1/p01A146/s1&Agg=doi

Author(s): Dong, H., Cabrera, W, Galatage, R V, KC, Santosh, Brennan, B, Qin, X, McDonnell, S, Zhernokletov, D, Hinkle, C L, Cho, K, Chabal, Y J and Wallace, R M

Published: 2013

Web link: http://link.aip.org/link/APPLAB/v103/i6/p061601/s1&Agg=doi

Author(s): Muller, Nicolas, Haberko, Jakub, Marichy, Catherine and Scheffold, Frank

Published: 2013

Web link: http://doi.wiley.com/10.1002/adom.201300415

Author(s): Yang, Jie, Tong, Ling, Yang, Yang, Chen, Xiaoqiang, Huang, Jun, Chen, Rizhi and Wang, Yong

Published: 2013

Web link: http://xlink.rsc.org/?DOI=c3tc30802b