Bibliography

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Sinha, Godhuli, Depero, Laura E and Alessandri, Ivano

Published: 2011

Web link: http://pubs.acs.org/doi/abs/10.1021/am200396n

Author(s): Shen, J, Zhang, C Y, Xu, T T, Jiang, A N, Zhang, Z Y, Wang, S and Chen, Q.

Published: 2011

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0040609011012144

Author(s): Grzanka, S, ?uka, G, Krajewski, T A and Guziewicz, E

Published: 2011

Web link:

Author(s): Rothschild, A., Nishibe, S, Cui, J, Zhu, N, Debucquoy, M, Mamagkakis, S, Nagaswami, V and John, J.

Published: 2011

Web link: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=6186245