Bibliography

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Contactless electroreflectance of ZnO layers grown by atomic layer deposition at low temperature

Author(s): Kudrawiec, R, Misiewicz, J and Guziewicz, E

Published: 2011

Web link: http://iopscience.iop.org/0268-1242/26/7/075012

Ion Exchange in Ultrathin Films of Cu2S and ZnS under Atomic Layer Deposition Conditions

Author(s): Thimsen, Elijah, Peng, Qing, Martinson, Alex B F, Pellin, Michael J and Elam, Jeffrey W

Published: 2011

Web link: http://pubs.acs.org/doi/abs/10.1021/cm201412p