Bibliography

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Gammon, P M, Pe?rez-Toma?s, A, Jennings, M R, Guy, O J, Rimmer, N, Llobet, J, Mestres, N, Godignon, P, Placidi, M, Zabala, M, Covington, J A and Mawby, P A

Published: 2010

Web link: http://link.aip.org/link/APPLAB/v97/i1/p013506/s1&Agg=doi

Author(s): Sprinkle, M, Ruan, M, Hu, Y, Hankinson, J, Rubio-Roy, M, Zhang, B, Wu, X, Berger, C and de Heer, W A

Published: 2010

Web link:

Author(s): Gabriel, Nicholas T, Kim, Sangho S and Talghader, Joseph J

Published: 2010

Web link: https://www.osapublishing.org/abstract.cfm?uri=OIC-2010-WD2