Bibliography

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Tien, Ta-Chang, Pan, Fu-Ming, Wang, Lih-Ping, Tsai, Feng-Yu and Lin, Ching

Published: 2010

Web link: http://pubs.acs.org/doi/abs/10.1021/jp1023229

Author(s): Tapily, K, Gu, D, Baumgart, H, Rigo, M and Seo, J

Published: 2010

Web link: http://ecst.ecsdl.org/content/33/2/117.short

Author(s): Henkel, C, Abermann, S, Bethge, O, Pozzovivo, G, Klang, P, St�ger-Pollach, M and Bertagnolli, E

Published: 2010

Web link: http://dx.doi.org/10.1016/j.mee.2010.11.003

Author(s): Henkel, C, Abermann, S and Bethge, O

Published: 2010

Web link: http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5610718

Author(s): Tapily, K, Apparaju, S, Rozgonyi, G and Gu, D

Published: 2010

Web link: http://ma.ecsdl.org/content/MA2010-02/22/1552.short

Author(s): Guziewicz, El?bieta, Godlewski, Marek, Krajewski, Tomasz A, Wachnicki, ?ukasz, ?uka, Grzegorz, Domaga?a, Jaros?aw Z, Paszkowicz, Wojciech, Kowalski, Bogdan J, Witkowski, Bart?omiej S, Du?y?ska, Anna and Suchocki, Andrzej

Published: 2010

Web link: http://doi.wiley.com/10.1002/pssb.200983699