Bibliography

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Bayraktaroglu, Burhan: Leedy, Kevin: Neidhard, Robert

Published: 2012

Web link: http://www.worldscientific.com/doi/abs/10.1142/S0129156411006507

Author(s): Klahr, Benjamin, Gimenez, Sixto, Fabregat-Santiago, Francisco, Bisquert, Juan and Hamann, Thomas W

Published: 2012

Web link: http://pubs.rsc.org/en/Content/ArticleHTML/2012/EE/C2EE21414H

Author(s): Riha, Shannon C, Libera, Joseph A, Elam, Jeffrey W and Martinson, Alex B F

Published: 2012

Web link: http://link.aip.org/link/RSINAK/v83/i9/p094101/s1&Agg=doi