Bibliography

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Nitrogen Implantation and Diffusion in Crystalline Germanium: Implantation Energy, Temperature and Ge Surface Protection Dependence

Author(s): Skarlatos, D, Bersani, M, Barozzi, M, Giubertoni, D, Vouroutzis, N Z and Ioannou-Sougleridis, V.

Published: 2012

Web link: http://jss.ecsdl.org/cgi/doi/10.1149/2.003301jss

Mechanical response of atomic layer deposition alumina coatings on stiff and compliant substrates

Author(s): Bull, Steve J

Published: 2012

Web link: http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6118294

Simulation-Aided Design and Synthesis of Hierarchically Porous Membranes

Author(s): Li, Fan, Wilker, Molly B and Stein, Andreas

Published: 2012

Web link: http://pubs.acs.org/doi/abs/10.1021/la300037q

Fabrication of coaxial nanowire heterostructures: SiO x nanowires with conformal TiO2 coatings

Author(s): Shalav, Avi, Venkatachalam, Dinesh K and Elliman, Robert G

Published: 2012

Web link: http://www.springerlink.com/index/10.1007/s00339-012-6804-y

Tailored 3D Mechanical Metamaterials Made by Dip-in Direct-Laser-Writing Optical Lithography

Author(s): B�ckmann, Tiemo, Stenger, Nicolas, Kadic, Muamer, Kaschke, Johannes, Fr�lich, Andreas, Kennerknecht, Tobias, Eberl, Christoph, Thiel, Michael and Wegener, Martin

Published: 2012

Web link: http://doi.wiley.com/10.1002/adma.201200584

Linewidth?Optimized Extraordinary Optical Transmission in Water with Template?Stripped Metallic Nanohole Arrays

Author(s): Lee, S H, Johnson, T W and Lindquist, N. C.

Published: 2012

Web link: http://onlinelibrary.wiley.com/doi/10.1002/adfm.201200955/full

Optical properties of cobalt slanted columnar thin films passivated by atomic layer deposition

Author(s): Schmidt, D.: Schubert, E.: Schubert, M.

Published: 2012

Web link:

Interfacial Properties of ALD-Deposited Al2O3/p-Type Germanium MOS Structures: Influence of Oxidized Ge Interfacial Layer Dependent on Al2O3 Thickness

Author(s): Botzakaki, M, Kerasidou, A, Sygellou, L., Ioannou-Sougleridis, V., Xanthopoulos, N, Kennou, S, Ladas, S., Vouroutzis, N Z, Speliotis, T and Skarlatos, D

Published: 2012

Web link: http://ssl.ecsdl.org/cgi/doi/10.1149/2.015202ssl

Mechanisms for Substrate-Enhanced Growth during the Early Stages of Atomic Layer Deposition of Alumina onto Silicon Nitride Surfaces

Author(s): Lamagna, Luca, Wiemer, Claudia, Perego, Michele, Spiga, Sabina, Rodr�guez, Jes�s, Santiago Coll, David, Grillo, Maria Elena, Klejna, Sylwia and Elliott, Simon D

Published: 2012

Web link: http://pubs.acs.org/doi/abs/10.1021/cm203362d

Passivation of type II InAs/GaSb superlattice photodetectors with atomic layer deposited Al2O3

Author(s): Salihoglua, O, Mutia, A, Kutluerb, K and Tanselb, T

Published: 2012

Web link: http://spiedigitallibrary.org/data/Conferences/SPIEP/67237/83530Z.pdf