Bibliography

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Hamann, T W, Martinson, ABF and Elam, J W

Published: 2008

Web link: http://onlinelibrary.wiley.com/doi/10.1002/adma.200702781/abstract

Author(s): Kriegler, C E, Rill, M S, Thiel, M, M�ller, E, Essig, S, Fr�lich, A, Freymann, G, Linden, S, Gerthsen, D, Hahn, H, Busch, K and Wegener, M

Published: 2009

Web link: http://www.springerlink.com/index/10.1007/s00340-009-3527-7

Author(s): Zhong, Zhaoxiang, Xu, Zhe, Sheng, Ting, Yao, Jianfeng, Xing, Weihong and Wang, Yong

Published: 2015

Web link: http://pubs.acs.org/doi/10.1021/acsami.5b06810

Author(s): Wachnicki, L, Lukasiewicz, M, Witkowski, B, Krajewski, T, Luka, G, Kopalko, K, Minikayev, R, Prze?dziecka, E, Domagala, J Z, Godlewski, M and Guziewicz, E

Published: 2010

Web link: http://doi.wiley.com/10.1002/pssb.200983687

Author(s): Xianzong Xie: Rieth, Loren: Caldwell, Ryan: Diwekar, Mohit: Tathireddy, Prashant: Sharma, Rohit: Solzbacher, Florian

Published: 2013

Web link: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=6525359

Author(s): Raposo, V, Zazo, M, Flores, A G, Garcia, J, Vega, V, I�iguez, J and Prida, V M

Published: 2016

Web link: http://scitation.aip.org/content/aip/journal/jap/119/14/10.1063/1.4945762