Bibliography

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Riha, Shannon C, Koegel, Alexandra A, Meng, Xiangbo, Kim, In Soo, Cao, Yanqiang, Pellin, Michael J, Elam, Jeffrey W and Martinson, Alex B F

Published: 2016

Web link: http://pubs.acs.org/doi/10.1021/acsami.5b11075

Author(s): Lee, B, Choi, K J, Hande, A, Kim, M J, Wallace, R M, Kim, J, Senzaki, Y, Shenai, D, Li, H, Rousseau, M and Suydam, J

Published: 2009

Web link: http://dx.doi.org/10.1016/j.mee.2008.03.020

Author(s): Acero, M C, Beldarrain, O, Duch, M, Zabala, M, Gonzalez, M B and Campabadal, F

Published: 2015

Web link: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7087443

Author(s): Mondloch, Joseph E, Bury, Wojciech, Fairen-Jimenez, David, Kwon, Stephanie, DeMarco, Erica J, Weston, Mitchell H, Sarjeant, Amy A, Nguyen, SonBinh T, Stair, Peter C, Snurr, Randall Q, Farha, Omar K and Hupp, Joseph T

Published: 2013

Web link: http://pubs.acs.org/doi/abs/10.1021/ja4050828

Author(s): Kim, Hyungchul, Singh, Ankit Kumar, Wang, Cheng-Yin, Fuentes-Hernandez, Canek, Kippelen, Bernard and Graham, Samuel

Published: 2016

Web link: http://scitation.aip.org/content/aip/journal/rsi/87/3/10.1063/1.4942510