Bibliography

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

Select the year of publication:

Optional - Enter a keyword or phrase to search for:

Author(s): Li, Rui, Lu, Yeqing, Zhou, Guangle, Liu, Qingmin, Chae, Soo Doo, Vasen, Tim, Hwang, Wan Sik, Zhang, Qin, Fay, Patrick, Kosel, Tom, Wistey, Mark, Xing, Huili and Seabaugh, Alan

Published: 2012

Web link: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=6140949

Author(s): Chalker, Paul R, Marshall, Paul A, Romani, Simon, Roberts, Joseph W, Irvine, Stuart J C, Lamb, Daniel A, Clayton, Andrew J and Williams, Paul A

Published: 2012

Web link: http://scitation.aip.org/content/avs/journal/jvsta/31/1/10.1116/1.4765642

Author(s): Spiga, S., Rao, R, Lamagna, L, Wiemer, C., Congedo, G., Lamperti, A, Molle, A., Fanciulli, M., Palma, F and Irrera, F

Published: 2012

Web link: http://link.aip.org/link/JAPIAU/v112/i1/p014107/s1&Agg=doi

Author(s): Li, Rui, Lu, Yeqing, Chae, Soo Doo, Zhou, Guangle, Liu, Qingmin, Chen, Chen, Shahriar Rahman, M, Vasen, Tim, Zhang, Qin, Fay, Patrick, Kosel, Tom, Wistey, Mark, Xing, Huili Grace, Koswatta, Siyuranga and Seabaugh, Alan

Published: 2012

Web link: http://doi.wiley.com/10.1002/pssc.201100241

Author(s): Li, Jingqi, Zhao, Chao, Wang, Qingxiao, Zhang, Qiang, Wang, Zhihong, Zhang, X X, Abutaha, A I and Alshareef, H N

Published: 2012

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0008622312004794

Author(s): Carcia, Peter F., McLean, Robert S, Li, Zhigang G, Reilly, Michael H and Marshall, Will J

Published: 2012

Web link: http://link.aip.org/link/JVTAD6/v30/i4/p041515/s1&Agg=doi