MOCVD Systems

MOCVD Systems

Veeco offers a range of industry-leading MOCVD equipment designed to maximize throughput while lowering cost of ownership. 

TurboDisc EPIK 700 GaN MOCVD System for LED Production

Reduce cost per wafer by up to 20 percent with Veeco’s award-winning EPIK 700 MOCVD system, the LED industry’s highest productivity MOCVD system.

TurboDisc K475i As/P MOCVD System

The TurboDisc K475i As/P MOCVD System is the industry’s highest productivity and lowest cost of ownership MOCVD system for high volume LED production

Propel Power GaN MOCVD System for Power Electronics

Produce highly efficient GaN-based power devices with Veeco’s new Propel™ Power GaN MOCVD system, featuring single-wafer reactor technology.

TurboDisc MaxBright MHP MOCVD System for LED Production

Improve wavelength uniformity across all wafers with the TurboDisc® MaxBright® MHP™ GaN MOCVD Multi-Reactor System, a new, modular high-performance system.

TurboDisc MaxBright M GaN MOCVD System for LED Production

Take advantage of the industry's highest footprint efficiency platform for LED manufacturing: the TurboDisc® MaxBright® M™ GaN MOCVD Multi-Reactor System.

TurboDisc K465i HP GaN MOCVD for High Volume LED Production

Increse productivity and get higher, best-in-class yields with the TurboDisc® K465i™ HP™ GaN MOCVD System. Its high-performance reactor is designed to increase within-wafer wavelength uniformity by up to 20 percent.

TurboDisc K475 As/P MOCVD System for Solar, ROY LED Production

Get unmatched reliability and throughput at the lowest cost with the TurboDisc® K475™ As/P MOCVD System. It's a best-in-class tool for the highest volume production of select compound semiconductor devices.

TurboDisc K465i GaN MOCVD for High Volume LED Production

Achieve the highest level of productivity and best-in-class yields with the TurboDisc® K465i™ GaN MOCVD System. It's production-proven for HB LED high-volume production fabs around the globe.

TurboDisc E475 As/P MOCVD System for Solar, ROY LED Production

Enable the highest volume production of premium devices with the TurboDisc E475 As/P System. It delivers increased capacity and improves cost of ownership, product quality, productivity and yield.