Medium Temperature

Medium Temperature

Medium-Temperature Processing: Striking the Perfect Balance for Optimal Results

Medium-temperature processing systems deliver more thermal energy than low-temp tools can provide, without crossing into the stress-inducing range of high-temp processes. Operating between 200–600°C, they create the perfect balance for enabling critical film transformations, crystallization and adhesion. Medium-temperature MBE sources can be used for virtually any application—from hot-lip SUMO sources to standard filament for thermal effusion.

Process Overview: Stability + Control = Impact

Using stable, tightly controlled heating systems, these platforms deliver consistent energy across the substrate. Engineers can dial in the right conditions for deposition, annealing or material tuning — getting the exact thermal impact they need without overexposing sensitive layers.

Veeco: Thermal Balance, Repeatable Results

Whether refining prototypes or ramping up production, our medium-temperature platforms – with real-time thermal monitoring, energy efficiency and adaptable configurations – help engineers hit the thermal sweet spot, balancing performance and protection.

Get a cost-effective solution that’s ideal for your high-volume, high-value MBE process needs with the Single Filament Sources. They…
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Attain large capacity, excellent flux uniformity, negligible shutter flux transients and minimal depletion effects with the Downward-Looking SUMO Source…
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Designed for growing high-quality Ga- and In-containing materials, the Dual Filament Source prevents charge material recondensation and reduces defects.
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Achieve excellent flux uniformity, negligible shutter flux transients, and minimized long-term depletion effects for MBE processes from the Hot…
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Achieve precise MBE operation at medium temperatures and partial pressures with Veeco oxygen-resistant, extended life sources.
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Maximize productivity and performance of ammonia (NH3)-based epitaxy with Veeco’s extended-life ammonia-resistant MBE sources for medium-temperature environments.
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Eliminate damage and get thickness uniformity and flux stability with the Cold Lip SUMO Source. It’s the optimal MBE…
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Veeco retractable sources address fundamental limitations of MBE, including source capacity, source removal for maintenance and system uptime.
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