Using ammonia (NH3) as the nitrogen source is becoming increasingly more common due to the ability to achieve high growth rates and for its ease of control. Consequently, ammonia can dramatically reduce equipment lifetime. Due to hydrogen embrittlement, it is not uncommon for source and heater filaments to last only a few months. Therefore, equipment uptime is compromised, leading to shorter campaign lengths and high repair costs.
Utilizing special ammonia resistant materials, Veeco enables operation of its innovative and proven sources and substrate heaters in high ammonia partial pressures. Veeco’s ammonia resistant sources and heaters are currently available for temperatures up to 1200°C with ammonia partial pressures as high as 1×10-4 Torr.