Lithography Systems

Lithography Systems

Leading the Way in Chip Design

When it comes to shaping what a chip can do, lithography systems lead the way by transferring intricate circuit designs onto substrates with unmatched precision. From prototyping to high-volume manufacturing, these tools define the geometry of modern microchips, as well performance.

Lithography 101: Project. Develop. Transfer.

A light source, typically ultraviolet (UV), is used to project the circuit design onto a light-sensitive photoresist. Once exposed, the photoresist is developed, revealing the desired pattern. That pattern is then transferred to the substrate through etching or deposition, depending on the process.

Where Lithography Outshines

Lithography becomes mission-critical when:

• Defining nanoscale features for advanced ICs and microprocessors
• Achieving precise alignment between layers in complex device stacks
• Scaling designs from lab prototypes to production-ready wafers

Veeco: Aligned for Accuracy

Veeco is the market leader in lithography systems designed specifically for the increasing challenges of smaller line and space. Our AP200/300 family of lithography systems deliver the resolution, overlay accuracy, and throughput needed to achieve next-generation patterning performance. With advanced optics, sub-50 nm alignment, and flexible platform configurations, they help support engineers at every stage of semiconductor development, from conception to high-volume manufacturing. Veeco is Making a Material Difference with AP Lithography:

• Industry-Leading warped wafer handling
• Optical focus capability
• CD Uniformity Superior line resolution for the most advanced L/S
• Leading installed-base and proven high-volume production