Atomic Layer Deposition Systems
Device node shrinking continues, with 10nm and 7nm node in production, and development taking place down to 3nm. Our atomic layer deposition tools give you ultimate precision and uniformity for coatings at even the finest nodes.
The Firebird™ System is a fully automated batch production ALD platform delivering excellent uniformity with best-in-class throughput and lowest…
The field-proven, semi-automated batch Phoenix® system delivers uncompromised performance for mid-scale batch production.
Savannah® is the preferred system for university researchers worldwide engaged in ALD and looking for an affordable yet robust…
Our Fiji® series is a modular, high-vacuum ALD system that accommodates a wide range of deposition modes using a…