GENxcel R&D MBE System

High quality epitaxial layers on substrates up to 4″ in diameter

The new, award-winning GENxcel™ system expands on the GENxplor™, the best-selling MBE system since its introduction in August 2013, with high-quality epitaxial growth on single 4” substrates compared to the 3” capabilities of the GENxplor system. The GENxcel system features an easy-to-use manual transfer system, 12 source ports and modern electronics fully integrated into a single frame design for maximum laboratory footprint efficiency.

  • High quality epitaxial layers on substrates up to 4″ in diameter
  • Unique, single frame architecture improves ease-of-use, provides convenient source access and enhanced serviceablility
  • Efficient, all-in-one design combines manual system with on-board electronics for 40 percent lab space savings compared to other MBE systems
  • Ideal for cutting-edge research on a wide variety of materials including GaAs, nitrides and oxides
  • Molly® software integrates easy recipe writing, automated growth control and always-on data recording
  • Optional Nova™ ultra high temperature substrate heater for proven performance at 1850°
  • Direct scalability to GEN20™, GEN200® and GEN2000® MBE systems

CS Industry Innovation Award - GENxcel MBE System

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