Bibliography

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Zhou, Yinhua, Cheun, Hyeunseok, Potscavage Jr, Willliam J, Fuentes-Hernandez, Canek, Kim, Sung-Jin and Kippelen, Bernard

Published: 2010

Web link: http://xlink.rsc.org/?DOI=c0jm00662a

Author(s): Lan, Yucheng, Wang, Hui, Wang, Dezhi, Gang, Chen and Ren, Zhifeng

Published: 2010

Web link: http://www.hindawi.com/journals/jnt/2010/279608/abs/

Author(s): Lamagna, L, Fusi, M, Spiga, S., Fanciulli, M., Brammertz, G, Merckling, C, Meuris, M and Molle, A.

Published: 2010

Web link: http://dx.doi.org/10.1016/j.mee.2010.10.035

Author(s): Kotha, R, Elam, D, Hoy, J and Collins, G

Published: 2010

Web link: http://ascelibrary.org/doi/pdf/10.1061/41096(366)329

Author(s): Yang, Zheng, Ko, Changhyun, Balakrishnan, Viswanath, Gopalakrishnan, Gokul and Ramanathan, Shriram

Published: 2010

Web link: http://link.aps.org/doi/10.1103/PhysRevB.82.205101