Bibliography

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Inverted organic solar cells with ITO electrodes modified with an ultrathin Al2O3 buffer layer deposited by atomic layer deposition

Author(s): Zhou, Yinhua, Cheun, Hyeunseok, Potscavage Jr, Willliam J, Fuentes-Hernandez, Canek, Kim, Sung-Jin and Kippelen, Bernard

Published: 2010

Web link: http://xlink.rsc.org/?DOI=c0jm00662a

Grids for Applications in High-Temperature High-Resolution Transmission Electron Microscopy

Author(s): Lan, Yucheng, Wang, Hui, Wang, Dezhi, Gang, Chen and Ren, Zhifeng

Published: 2010

Web link: http://www.hindawi.com/journals/jnt/2010/279608/abs/

Integrated Sustainability Analysis of Atomic Layer Deposition for Microelectronics Manufacturing

Author(s): Yuan, Chris Y and Dornfeld, David A

Published: 2010

Web link: http://link.aip.org/link/JMSEFK/v132/i3/p030918/s1&Agg=doi

O-based atomic layer deposition of hexagonal LaO films on Si (100) and Ge (100) substrates

Author(s): Lamagna, L, Wiemer, C., Perego, M and Volkos, S N

Published: 2010

Web link: http://link.aip.org/link/japiau/v108/i8/p084108/s1

Effects of surface passivation during atomic layer deposition of Al2O3 on In0.53Ga0.47As substrates

Author(s): Lamagna, L, Fusi, M, Spiga, S., Fanciulli, M., Brammertz, G, Merckling, C, Meuris, M and Molle, A.

Published: 2010

Web link: http://dx.doi.org/10.1016/j.mee.2010.10.035

Sustainable scale-up studies of Atomic Layer Deposition for microelectronics manufacturing

Author(s): Yuan, C Y and Sheng, Y

Published: 2010

Web link: http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5507682

Air-gap capacitance-Voltage analysis of p-InP surfaces

Author(s): Yoshida, T and Hashizume, T

Published: 2010

Web link: http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5516369

A comparative study of the photoluminescence and conduction mechanisms of low temperature pulsed laser deposited and atomic layer deposited zinc oxide thin films

Author(s): Kuo, Fang Ling, Lin, Ming-Te, Mensah, Benedict A, Scharf, Thomas W and Shepherd, Nigel D

Published: 2010

Web link: http://doi.wiley.com/10.1002/pssa.201026152

Microstructure Evolution of Atomic Layer Deposited Zinc-Oxide Films

Author(s): Kotha, R, Elam, D, Hoy, J and Collins, G

Published: 2010

Web link: http://ascelibrary.org/doi/pdf/10.1061/41096(366)329

Dielectric and carrier transport properties of vanadium dioxide thin films across the phase transition utilizing gated capacitor devices

Author(s): Yang, Zheng, Ko, Changhyun, Balakrishnan, Viswanath, Gopalakrishnan, Gokul and Ramanathan, Shriram

Published: 2010

Web link: http://link.aps.org/doi/10.1103/PhysRevB.82.205101