Bibliography

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): B�low, Tim, Gargouri, Hassan, Siebert, Mirko, Rudolph, Rolf, Johannes, Hans-Hermann and Kowalsky, Wolfgang

Published: 2009

Web link: http://www.nanoscalereslett.com/content/9/1/223

Author(s): Spiga, S., Lamperti, A, Cianci, E and Volpe, F G

Published: 2009

Web link: http://ecst.ecsdl.org/content/25/6/411.short

Author(s): Shen, Jun, Wang, Wei, Chen, Qing, Wang, Mingsheng, Xu, Shengyong, Zhou, Yinglin and Zhang, Xin-Xiang

Published: 2009

Web link: http://stacks.iop.org/0957-4484/20/i=24/a=245307?key=crossref.20258190605a3ebc9f645c4fab27b6a8

Author(s): Bethge, Ole, Abermann, Stephan, Henkel, Christoph, Straif, Christoph J, Hutter, Herbert and Bertagnolli, Emmerich

Published: 2009

Web link: http://jes.ecsdl.org/cgi/doi/10.1149/1.3205455

Author(s): Bethge, Ole, Abermann, Stephan, Henkel, Christoph and Bertagnolli, Emmerich

Published: 2009

Web link: http://dx.doi.org/10.1016/j.tsf.2009.03.190