Bibliography

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Kim, Yongmin: Provine, J.: Walch, Stephen P: Park, Joonsuk: Phuthong, Witchukorn: Dadlani, Anup Lal: Kim, Hyo Jin: Schindler, Peter: Kim, Kihyun: Prinz, Fritz B

Published: 2016

Web link: http://pubs.acs.org/doi/abs/10.1021/acsami.6b03194

Author(s): Roige, A, Osso?, J O, Martin, I, Voz, C, Ortega, P, Lopez-Gonzalez, J M, Alcubilla, R and Vega, L F

Published: 2016

Web link: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7389963