Bibliography

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Vermang, B., Rothschild, A., Racz, A., John, J., Poortmans, J., Mertens, R., Poodt, P., Tiba, V. and Roozeboom, F

Published: 2011

Web link:

Author(s): Alevli, M.: Ozgit, C.: Donmez, I.

Published: 2011

Web link:

Author(s): Timm, R, Hjort, M, Fian, A, Thelander, C, Lind, E, Andersen, J N, Wernersson, L E and Mikkelsen, A

Published: 2011

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0167931711003467