Top European Research Center Selects Veeco’s Ion Beam Etch System for 5G RF Filter Production

News | Nov 10, 2021

Plainview, N.Y. – Veeco Instruments Inc. (NASDAQ: VECO) announced today that Silicon Austria Labs (SAL) has selected Veeco’s Lancer™ Ion Beam Etch (IBE) System for the production of 5G RF Filters that enable mobile broadband connection of mobile devices, wireless machine-to-machine communication and radar systems typically used in autonomous driving applications. The Lancer system will be used to etch piezoelectric materials, the key technology in next generation RF filters, sensors and actuators.

“Throughout our interactions with Veeco, it has become apparent that their ion beam etch capabilities, unique expertise and close collaboration with us will provide clear advantages for our efforts here at Silicon Austria Labs,” commented SAL’s Mohssen Moridi, Ph.D., Head of Research Unit Microsystem Technologies. “In addition to the system’s ease-of-use, process flexibility and exceptional performance, the service and support offered by the Veeco team has made a strong impression on our group.”

The Lancer Ion Beam Etch System was designed for the development and production of next generation electronic devices found in 5G RF Filters, smartphones, self-driving automobiles and other ‘internet-of-things’ devices that enable superior connectivity, functionality and mobility.

“We are proud to have been selected by Silicon Austria Labs, an innovative leader in future-oriented solutions for electronic-based systems,” commented Adrian Devasahayam, Ph.D., Veeco’s Senior Vice President, Product Line Management. “The Lancer IBE system is built on a production-proven platform with its patented tunable ion source technology providing unmatched process performance on 200 millimeter wafer substrates required for next generation RF devices. With over 300 ion beam systems in the field, we believe our ion beam etch technology is well-suited to handle rigorous demands for devices that require piezoelectric materials. We look forward to supporting SAL’s research excellence and positive economic impact.”

About Veeco
Veeco (NASDAQ: VECO) is an innovative manufacturer of semiconductor process equipment. Our proven ion beam, laser annealing, lithography, MOCVD, and single wafer etch & clean technologies play an integral role in the fabrication and packaging of advanced semiconductor devices. With equipment designed to optimize performance, yield and cost of ownership, Veeco holds leading technology positions in the markets we serve. To learn more about Veeco’s systems and service offerings, visit

About Silicon Austria Labs (SAL)
Silicon Austria Labs is a top European research center for electronic-based systems. In the network of science and industry, they carry out research at the highest global research level and thus create the basis for new types of products and processes. SAL propels ideas into innovation in the fields of sensor systems, radio frequency systems, power electronics, system integration technologies and embedded systems with a consistent research excellence and economic impact. To learn more about SAL, visit

To the extent that this news release discusses expectations or otherwise makes statements about the future, such statements are forward-looking and are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include the risks discussed in the Business Description and Management’s Discussion and Analysis sections of Veeco’s Annual Report on Form 10-K for the year ended December 31, 2020 and in our subsequent quarterly reports on Form 10-Q, current reports on Form 8-K and press releases. Veeco does not undertake any obligation to update any forward-looking statements to reflect future events or circumstances after the date of such statements.


Veeco Media Contact:
Kevin Long | (516) 714-3978 |

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