Ion Sources

Ion Sources

Veeco offers the most comprehensive array of ion beam sources for a broad range of applications, including the industry's only Linear gridded sources.

Gridded DC Ion Sources

Proven linear gridded DC Ion Sources for highly uniform, reliable ion beam deposition process platforms utilizing large/wide individual substrates or large substrate batches.

Gridless End-Hall Ion Sources

Veeco's Gridless End Hall Ion Sources provide high beam current for vacuum coating processes.

Gridded RF Ion Sources

Veeco's gridded RF ion sources are designed for improved production of long-run ion beam deposition processes.