Ion Beam System & Sources

Ion Beam Sputtering: Tight Control. Consistent Layering.

Known for precision and cleanliness, Veeco Ion Beam Sputtering (IBS) systems are ideal when engineers need tight control over film thickness, composition, and optical performance. Using a focused ion beam, IBS dislodges atoms from a target, depositing them onto a surface in smooth, ultra-uniform layers.

How Sputtering Works

A beam of ions, usually argon, is generated and narrowed to strike a solid target. As atoms sputter off the target, they travel toward the substrate where they build up a thin film. At the same time, engineers can adjust beam energy, target angle, and substrate position to fine-tune how the film forms, layer by layer.

Common Sputtering Scenarios

IBS is the go-to method when:

• Ultra-high film uniformity is critical for device performance
• Film smoothness and optical clarity must be top tier
• Materials or device designs require precise tuning of thickness and microstructure

Veeco: High Quality Results That Scale

Our SPECTOR® Ion Beam Sputtering systems offer precise deposition control with real-time process monitoring and flexible configuration options. Whether optimizing coatings for optics or fabricating thin-film electronics, our scalable platforms help engineers produce consistent, high-quality results, from the first layer to full production. When materials matter most, your ultra-precise, high-purity, thin film layer devices will achieve maximum uniformity and repeatability with our ion beam deposition systems.

Ion Beam Deposition: For Film Stability That Lasts

When a thin film requires the most stringent structural or compositional properties consistently across every layer, Veeco’s Ion Beam Deposition (IBD) technology is often the answer. Using a focused beam of ions to sputter material from a target, this physical vapor deposition technique builds dense, uniform films with standout adhesion and stability.

An Easily Adjustable Process

A high-energy ion beam, usually made of argon, is aimed at a target material. As the ions strike, atoms are ejected and settle onto the surface below, forming a tightly packed, high-quality film. Meanwhile, engineers can adjust parameters like beam angle, energy, and substrate temperature to control the film’s composition and structure in fine detail.  

Where Ion Beam Deposition Makes an Impact

IBD steps in when:

• Smooth, high-density coatings are a must
• Devices need strong film adhesion to perform reliably over time
• Optical or electronic materials call for precise control over film structure or composition

Veeco: Start-to-Finish Consistency

Our Nexus IBD-LDD Ion Beam Deposition System and third-generation NEXUS® Ion Beam Deposition (IBD) System are built to give engineers complete command of the deposition process. From fine-tuning beam energy to adjusting geometry on the fly, our tools make it easy to achieve consistent results. With real-time diagnostics and a modular design that scales from early-stage R&D to full-scale production, Veeco helps deliver quality, layer after layer. Create ultra-precise, high-purity, thin film layer devices with maximum uniformity and repeatability with our Ion Beam Deposition (IBD) Systems.

Ion Beam Etch: Ensuring Precise Material Removal

When it comes to clean etches, Veeco’s Ion Beam Etch (IBE) systems deliver with sharp control and minimal disruption. Using a focused argon ion beam, this subtractive technique etches nanoscale features with precision, making it a go-to for pattern transfer, layer removal, and surface refinement where edge definition matters most.

A Process That Puts You in Control

IBE systems direct a high-energy ion beam at the material surface, sputtering away atoms, and carving out clean, directional etch profiles. Meanwhile, engineers can adjust beam angle, energy, and current to tune the process—shaping etch depth, sidewall angle, and material selectivity as needed.

Where IBE Makes Its Mark

Ion Beam Etch is ideal for:

• Patterning delicate, high-resolution features in advanced ICs
• Removing specific layers in multi-material stacks
• Creating smooth, directional etches for photonic and MEMS devices

Veeco: Repeatable Success

Our NEXUS® IBE™ Ion Beam Etching System gives engineers full control over every detail, including beam incidence, energy distribution, and real-time monitoring. Whether in R&D or production, our systems make it easy to achieve repeatable, low-damage results across a wide range of materials and applications. Etch precise, complex features for high-yield production of discrete microelectronic devices and components with the NEXUS® Ion Beam Etch (IBE) Systems.

Veeco offers the most comprehensive array of ion beam sources for a broad range of applications, including the industry's only Linear gridded sources.

When durability matters, Diamond-Like Carbon (DLC) coatings deliver. Known for their hardness, low friction, and chemical resistance, DLC films are the go-to solution for protecting surfaces in high-stress environments: from precision mechanical parts to advanced semiconductor devices.

Why DLC Works So Well

DLC coatings combine the toughness of diamond with the versatility of thin films. Using ion beam sputtering, these coatings can be applied at relatively low temperatures, making them compatible with sensitive substrates. Engineers can fine-tune the process to get the exact film properties needed, whether it’s more hardness, less stress, or a specific optical finish. And because the coating is uniform even on complex shapes, performance stays consistent from part to part.

Where You’ll See DLC in Action

DLC coatings show up wherever components face friction or harsh environments. In mechanical systems, they reduce wear and energy loss. In corrosive settings, they add a layer of chemical protection. And in medical devices, DLC’s biocompatibility makes it safe for contact with the human body. They’re also used in optics, where a smooth, durable surface can enhance clarity and longevity.

Veeco DLC: A Wide Range of Support

Veeco offers flexible, scalable NEXUS DLC-X systems with precise process control, allowing engineers to dial in the right film quality every time. Whether you're building a single prototype or scaling to high-volume production, our systems support a wide range of materials: from metals to polymers. Your microelectronics, medical devices and automotive components need the thermal resistance and resistivity that can only be achieved with diamond-like carbon films created with our deposition systems.