Technology & Products

Ultratech - A Division of Veeco

The Ultratech division provides laser processing solutions for advanced annealing, photo- lithography for advanced packaging and inspection systems for inline wafer monitoring.   

MOCVD Systems

Veeco offers a range of industry-leading MOCVD equipment designed to maximize throughput while lowering cost of ownership. 

Lithography Systems

Ultratech’s family of lithography steppers are designed to specifically meet the unique needs of Advanced Packaging applications

Laser Processing Systems

Ultratech has developed revolutionary technology products to enable thermal annealing solutions at the 65nm technology node and beyond

Wafer Inspection Systems

Ultratech coherent-gradient-sensing-based (CGS) 3D wafer inspection system enables wafer fabs to inspect patterned wafers at key processing steps.

Precision Surface Processing Systems

Veeco's Precision Surface Processing Systems are on the leading edge of wet processing for advanced packaging, RF, MEMS, flat panel, and compound semiconductor industries.

MBE Technologies

Veeco provides the industry’s broadest line-up of innovative and reliable molecular beam epitaxy (MBE) systems.

Ion Beam Sputtering

Veeco offers a range of ion beam sputtering technology for precision optical coatings and optoelectronic devices.

Gas & Vapor Delivery Systems

Veeco’s gas and vapor delivery systems address critical issues facing semiconductor manufacturers and foundries, including material costs, process repeatability and system up-time. 

Ion Beam Systems & Sources

Veeco offers industry-leading ion beam etch and deposition technologies.

Diamond-Like Carbon

Deposit dense, uniform, and repeatable thin, diamond-like carbon (DLC) films for longer-lasting TFMH slider overcoats and landing pads with Veeco's NEXUS DLC-X System. 

Physical Vapor Deposition

Veeco's Physical Vapor Deposition Systems offer maximum flexibility for a wide range of thin film deposition applications.

Dicing and Lapping Systems

Veeco's dicing and lapping systems deliver high-productivity dicing solutions for a broad range of applications, such as read/write recording heads, LEDs, solar cells, microelectronics, and photonics.

Atomic Layer Deposition

Veeco's atomic layer deposition systems (Savannah, Fiji, and Phoenix) are designed to deposit pinhole free coatings that are perfectly uniform in thickness, even deep inside pores, trenches and cavities.