Mark II+ Gridless Ion Source

Increased Beam Output and Improved Maintenance Features

Dramatically increased beam current and a removable anode assembly adds new value to the Mark II+ End-Hall Ion Source, providing an evolutionary improvement to Veeco’s industry-leading line of gridless ion sources for optical coating systems.

• Up to 70 percent greater beam current for higher-rate processes and larger chambers
• Removable anode assembly enables quicker maintenance and less downtime
• Integrated feedthroughs and cabling for ease-of-installation and reliability
• Suitable for reactive and inert gases and high-power densities
• Smaller form factor uses same mounting plate as Mark II sources for faster upgrades
• Flexible integration permits space-saving system design and broad beam angle