GEN200 MBE System

Most Cost-Effective and Highest-Capacity Multi-4″ Production MBE System in the Market

Veeco’s GEN200® MBE system is the most cost-effective and highest-capacity multi-4″ production MBE system in the market today. The system delivers superior throughput, long campaigns and excellent wafer quality in growing GaAs- or InP-based wafers for such devices as pump lasers, VCSELs and HBTs.

  • Delivers the lowest-cost 4 x 4″ epiwafer growth
  • Modular architecture allows significantly smaller footprint than comparable MBE systems
  • Allows for up to two growth modules, increasing throughput or allowing processing of incompatible materials
  • Optional bulkhead installation optimizes cleanroom space
  • Incorporates the industry’s most innovative, reliable system hardware, sources and components

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