GEN20 MBE System

Ultra-Flexible Tool with a Design Configurable for III-V and Emerging Materials

Veeco’s GEN20™ MBE system is an ultra-flexible tool with a design configurable for III-V and emerging materials, including applications that require the integration of e-beam technology. The system incorporates production design technology that allows for an optional cluster tool wafer transfer system for an ideal lab-to-fab migration.

  • Ideal for materials research and pre-production environments
  • Vertical source to substrate orientation with 12 MBE source ports and the option to add e-beam capabilities
  • Manual or automated wafer transfer options
  • Configurable cryopanel, manipulator, shutters and in-situ monitoring equipment
  • Modular design allows up to two growth modules

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