Bibliography

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): MacFarlane, Duncan L, Christensen, Marc P, Nagdi, Amr El, Evans, Gary A, Hunt, Louis R, Huntoon, Nathan, Kim, Jiyoung, Kim, Tae W, Kirk, Jay, LaFave, Tim P, Liu, Ke, Ramakrishna, Viswanath, Dabkowski, Mieczyslaw and Sultana, Nahid

Published: 2012

Web link: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=6069520

Author(s): ?ukasiewicz, M I, W�jcik-G?odowska, A, Guziewicz, E, Wolska, A, Klepka, M T, D?u?ewski, P, Jakie?a, R, ?usakowska, E, Kopalko, K, Paszkowicz, W, Wachnicki, ?, Witkowski, B S, Lisowski, W, Krawczyk, M, Sobczak, J W, Jab?o?ski, A and Godlewski, M

Published: 2012

Web link: http://stacks.iop.org/0268-1242/27/i=7/a=074009?key=crossref.3468d1abb84a44318782b13426c32e5b

Author(s): Coll, Mariona, Gazquez, Jaume, Palau, Anna, Varela, Maria, Obradors, Xavier and Puig, Teresa

Published: 2012

Web link: http://pubs.acs.org/doi/abs/10.1021/cm301864c

Author(s): Thimsen, Elijah, Riha, Shannon C, Baryshev, Sergey V, Martinson, Alex B F, Elam, Jeffrey W and Pellin, Michael J

Published: 2012

Web link: http://pubs.acs.org/doi/abs/10.1021/cm3015463

Author(s): Chung, K. J., Park, T. J., Sivasubramani, P., Kim, J and Ahn, J.

Published: 2012

Web link: http://linkinghub.elsevier.com/retrieve/pii/S0167931711004096