Bibliography

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Ozgit, Cagla: Donmez, Inci: Alevli, Mustafa: Biyikli, Necmi

Published: 2012

Web link: http://scitation.aip.org/content/avs/journal/jvsta/30/1/10.1116/1.3664102

Author(s): Ning, Hailong, Mihi, Agustin, Geddes III, Joseph B, Miyake, Masao and Braun, Paul V.

Published: 2012

Web link: http://doi.wiley.com/10.1002/adma.201104769

Author(s): Gkotsis, Petros: Kilchytska, Valeriya: Fragkiadakis, Charalampos: Kirby, Paul B: Raskin, Jean-Pierre: Francis, Laurent A

Published: 2012

Web link: http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=6280582