Bibliography

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Ozgit-Akgun, Cagla: Goldenberg, Eda: Bolat, Sami: Tekcan, Burak: Kayaci, Fatma: Uyar, Tamer: Okyay, Ali Kemal: Biyikli, Necmi

Published: 2015

Web link: http://doi.wiley.com/10.1002/pssc.201400167