Bibliography

Veeco CNT ALD customers are at the leading edge of ALD research around the world resulting in more publications than on any other commercial ALD platforms.

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Author(s): Hamann, T W, Martinson, ABF and Elam, J W

Published: 2008

Web link: http://onlinelibrary.wiley.com/doi/10.1002/adma.200702781/abstract

Author(s): Guziewicz, E, Kowalik, I A, Godlewski, M, Kopalko, K, Osinniy, V, Wo?jcik, A, Yatsunenko, S, ?usakowska, E, Paszkowicz, W and Guziewicz, M

Published: 2008

Web link: http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=4946316

Author(s): Dasgupta, Neil P, Walch, Stephen P and Prinz, Friedrich

Published: 2008

Web link: http://ecst.ecsdl.org/cgi/doi/10.1149/1.2979978

Author(s): Bethge, Ole, Abermann, Stephan, Henkel, Christoph and Bertagnolli, Emmerich

Published: 2008

Web link: http://ecst.ecsdl.org/cgi/doi/10.1149/1.2981618

Author(s): Ahn, Jong Hyun, Zhu, Zhengtao, Park, Sang Il, Xiao, Jianliang, Huang, Yonggang and Rogers, John A

Published: 2008

Web link: http://doi.wiley.com/10.1002/adfm.200800176