The combination of Veeco’s advanced sensor technology that tracks a wider number of tool parameters with Rudolph’s best-in-class fault detection software platform creates a unique maintenance solution that enables customers to reduce unscheduled system downtime, proactively manage system maintenance and detect early failure problems before they occur.
Based on customer feedback and extensive field data on Veeco NEXUS® ion beam etch tools, Veeco’s Predictive Analytics solution achieved over 15% lower maintenance costs from a reduction in wafer scrap, unscheduled tool downtime and material costs.
“We have demonstrated the ability to change the service structure from scheduled to predictive maintenance, which will have a favorable impact on our customers’ operational efficiency when fully implemented,” said Guy Shechter, Vice President of Veeco Service Products and Marketing. “Being able to predict mechanical failures, maintenance scheduling and critical component degradation directly translates to improved tool performance, increased uptime and most importantly a reduction in overall cost of ownership.”
Veeco formed its partnership with Rudolph to develop technology-specific solutions that work in unison with Veeco’s existing system software to enhance etch and deposition tool performance, as well as provide upgrades for Veeco’s global install base. The Veeco Predictive Analytics product is based on Rudolph’s recently introduced Equipment Sentinel™ software platform, which features a new smart dashboard platform that allows customers to seamlessly turn equipment data into actionable operational intelligence.
“As a global leader in process control and data analysis systems and software for semiconductor and advanced packaging manufacturers, we are excited about partnering with Veeco to provide a revolutionary software platform,” said Thomas Sonderman, Vice President and General Manager of Rudolph’s Software Business Unit. “Together, we created a solution that is fully integrated to Veeco’s systems and has achieved superior early failure detection capabilities compared to previous platforms.”
Veeco’s process equipment solutions enable the manufacture of LEDs, displays, power electronics, compound semiconductors, hard disk drives, semiconductors, MEMS and wireless chips. We are the leader in MOCVD, MBE, Ion Beam, Wet Etch single wafer processing and other advanced thin film process technologies. Our high performance systems drive innovation in energy efficiency, consumer electronics and network storage and allow our customers to maximize productivity and achieve lower cost of ownership. For information on our company, products and worldwide service and support, please visit www.veeco.com.
About Rudolph Technologies
Rudolph Technologies, Inc. is a leader in the design, development, manufacture and support of defect inspection, lithography, process control metrology, and process control software used by semiconductor and advanced packaging device manufacturers worldwide. Rudolph delivers comprehensive solutions throughout the fab with its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market of their devices. Headquartered in Wilmington, Massachusetts, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the Company’s website at www.rudolphtech.com.
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Jeffrey Pina Amy Shay
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