The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition
| Apr 02, 2020
Recent Posts
Veeco is the industry leader driving HDD manufacturing to new levels of productivity.
University of Michigan Research Study Demonstrates Novel Synthesis of High-Quality 2D Molybdenum Disulfide Using Veeco’s Fiji ALD System