Low-leakage Tetragonal ZrO2 (EOT < 1 nm) with In Situ Plasma Interfacial Passivation on Germanium - Veeco

Low-leakage Tetragonal ZrO2 (EOT < 1 nm) with In Situ Plasma Interfacial Passivation on Germanium

| Apr 02, 2020

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