Electrical characterization of atomic-layer-deposited hafnium oxide films from hafnium tetrakis(dimethylamide) and water/ozone: Effects of growth temperature, oxygen source, and postdeposition annealing
Apr 02, 2020
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Veeco Announces Upcoming Investor Events
PLAINVIEW, N.Y., May 19, 2020 (GLOBE NEWSWIRE) — Veeco Instruments Inc. (NASDAQ: VECO) today announced that management…