2 MeV electron irradiation effects on the electrical characteristics of metal?oxide?silicon capacitors with atomic layer deposited Al2O3, HfO2 and nanolaminated dielectrics - Veeco

2 MeV electron irradiation effects on the electrical characteristics of metal?oxide?silicon capacitors with atomic layer deposited Al2O3, HfO2 and nanolaminated dielectrics

| Apr 02, 2020

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