Gridded DC Ion Sources

Gridded DC Ion Sources

Proven linear gridded DC Ion Sources for highly uniform, reliable ion beam deposition process platforms utilizing large/wide individual substrates or large substrate batches.

6cm x 30cm DC Ion Source

A proven linear source for large/wide substrates or large substrate batches, Veeco's gridded DC Ion Sources are ideal for highly uniform, reliable ion beam deposition process platforms.

SOLUS DC Ion Source Controllers

Get stable power for ion source operation with Veeco's SOLUS™ DC Ion Source Controller, featuring a state-of-the-art precision control system design.