Gridded DC Ion Sources

Gridded DC Ion Sources

Proven linear gridded DC Ion Sources for highly uniform, reliable ion beam deposition process platforms utilizing large/wide individual substrates or large substrate batches.

SOLUS DC Ion Source Controllers

Get stable power for ion source operation with Veeco's SOLUS™ DC Ion Source Controller, featuring a state-of-the-art precision control system design.

6cm x 30cm DC Ion Source

A proven linear source for large/wide substrates or large substrate batches, Veeco's gridded DC Ion Sources are ideal for highly uniform, reliable ion beam deposition process platforms.