Wafer Inspection Systems

Wafer Inspection Systems

Superfast 3D wafer inspection system was developed by leveraging Ultratech’s core competencies in optics engineering, system integration and extensive knowledge of material physics.

Superfast 4G Wafer Inspection System

Superfast 4G has improved the previous generation tool with a lower cost of ownership and was adopted for FinFET topography and distortion control


Superfast 4G+ Wafer Inspection System

Superfast 4G+ has upgrades that improve throughput, displacement repeatability and edge exclusion compared to the 4G