Ion Beam Sputtering

Ion Beam Sputtering

Veeco offers a range of ion beam sputtering technology for precision optical coatings and optoelectronic devices.

SPECTOR-HT Ion Beam Sputtering System for Optical Coating

Produce the highest quality optical thin films with improved levels of productivity and throughput with the award-winning SPECTOR-HT™ Advanced Ion Beam System.

SPECTOR Loadlock Ion Beam Sputtering System for Optical Coating

Easily double throughput for designs in which the deposition time is shorter than the typical pre-process steps required of batch tools with Veeco's SPECTOR Loadlock System.

SPECTOR Ion Beam Deposition Sputtering for Optical Coating

Achieve greater precision and thin film process flexibility with Veeco's SPECTOR® Ion Beam Sputtering (IBD) Optical Coating System.

SPECTOR Large Area Ion Beam Deposition System for Optical Coating

Get unsurpassed ion beam film quality with batch sizes near that of e-beam systems with Veeco's SPECTOR® Large Area Planetary Ion Beam Deposition System.