Veeco’s Gas Delivery System (GDS) provides precise control of gases, interlocks and monitoring for inert, hazardous and/or flammable gases. Molly® ECS1 Growth Control Software allows for easy integration into an existing system.
A variety of package options are available to suit all needs and budgets. All packages are inclusive of manual gas line shut off valve for each circuit, gas filter purifier, mass flow controller and pneumatically controlled run and vent valves.
- Efficient, safe means of controlling gases for Veeco MBE gas sources
- Easy process manipulation and monitoring
- Three model configurations to suit specific applications and budgets